Goalkeeper Megan Taylor led the way with 10 saves.
The Terps scored 25 goals for the first time in 15 years.
The Wildcats drew within two in the second half, but the Terps pulled away with a 9-0 run to close the game.
Northwestern upset the Terps in the Big Ten tournament championship on May 5. Now, a rematch looms.
Steele tallied a career-high seven goals.
“Whether it hurts you or helps you,” Tillman said, “it’s really about getting the play right.”
Caroline Steele scored seven goals.
A controversial Cavaliers' goal tied the game late.
The Terps have had mixed results against zone defenses this year.
“They get up and down, they’re athletic, they’re skilled, they’re very talented [and] they’re tough off the ground.”